United States Patent | 5,380,595 |
Ueba, et. al. | Jan. 10, 1995 |
Inventors: | Ueba; Yoshinobu (Osaka, JPX); Okuda; Nobuyuki (Osaka, JPX); Ohkura; Kengo (Osaka, JPX); Kugai; Hirokazu (Osaka, JPX). |
Assignee: | Sumitomo Electric Industries, Ltd. (Osaka, JPX). |
Appl. No.: | 963,826 |
Filed: | Oct. 20, 1992 |
Oct. 25, 1991 [JPX] | 3-279794 |
Intl. Cl.: | H01B 1/04; |
U.S. Cl.: | 428/408.; 423/446.; |
Field of Search: | 408 |
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A carbon cluster film has a precisely controlled stable electrical conductivity which does not deteriorate in a short period of time in air. Such a carbon cluster film having a stable electrical conductivity is formed by introducing an impurity into a thin film of fullerenes by ion implantation. The fullerenes include C(60), C(70) or the like.